Abstract
Un-doped, Al-doped, and Sn-Al co-doped ZnO thin films have been successfully synthesized by Spray Pyrolysis method. Zinc Nitrate (Zn(NO3)2), Tin Chloride (SnCl2) and Aluminum Nitrate (Al(NO3)3) were used as starting chemicals at different compositions. Films depositions were carried out on glass substrates at 350 °C. The X-ray diffraction confirmed that the Al-Sn co-doping did not change the ZnO Hexagonal Wurtzite structure. The obtained un-doped ZnO films were highly oriented along the preferential (002) crystallographic plane while the Sn- Al co-doped ZnO films were disoriented with slight loss of crystallinity. The optical measurement showed an increase of the average transmittance from 65 % to 81 % and the band gap energy (Eg) from 3.23 to 3.30 eV. The electrical conductivity has increased with the Al-Sn co-doping concentration to reach the value of 0.335 (Ω.cm)−1.
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