Abstract
The authors report the enhancement of the magnetic sensitivity of single-crystal diamond (SCD) MEMS magnetic sensor, which is composed of a SCD cantilever integrated with a magneto-strictive Galfenol (FeGa) thin film. To improve the magnetic sensing properties from room temperature to high temperatures, different interlayers of Ti film, WC film, and WC/Ti film are inserted between the SCD cantilevers and the FeGa thin films in the SCD-MEMS magnetic sensors. The thermal-stability of the microstructures, phase structures, and magnetic properties of the FeGa thin films are greatly enhanced by these interlayers. The FeGa thin films within the FeGa/SCD, FeGa/Ti/SCD, FeGa/WC/SCD, and FeGa/Ti/WC/SCD structures maintain high thermal-stability in surface morphologies, roughness, phase structures, and magnetic properties under the annealing temperature up to 573 K, 773 K, 573 K, and 673 K, respectively. The magnetic sensor with the FeGa/SCD structure has the weakest magnetic sensitivity of 1.96 Hz/mT @573 K and the FeGa/WC/Ti/SCD structure hosts the highest magnetic sensitivity of 75.40 Hz/mT @673 K. The present work provides a strategy to tailor the magnetic sensing properties of SCD MEMS for the applications under extreme conditions.
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