Enhancement of light output power on GaN‐based light‐emitting diodes using two‐direction stripe‐patterned sapphire substrate

Abstract

AbstractTo achieve both the reduction of threading dislocation density (TDD) and the enhancement of light extraction efficiency (LEE) of light‐emitting diodes (LEDs), a two‐directional stripe‐patterned sapphire substrate (TPSS) was fabricated. First, a stripe pattern parallel to the a‐axis of Al2O3 was formed on an as‐received c ‐sapphire wafer and then a second stripe pattern rotated around 3° from the m‐axis of Al2O3 was formed on the first stripe PSS. The light output power of TPSS LEDs was around 1.25 times higher than that of LEDs on a flat sapphire substrate. This enhancement is caused by the increase of both the internal quantum efficiency (IQE) and the LEE. On the other hand, although the LED on TPSS with the second stripe just parallel to the m‐axis of Al2O3 showed a similar enhancement ratio of the light output power, the current leakage of this LED increased with the concentration of threading dislocations on the surface of LEDs. Stripes rotated 3° from the m‐axis of Al2O3 changed the growth mode and realized GaN films with a smooth surface without pit formation. Therefore, the misalignment of the stripe from the m‐axis of Al2O3 will become a new design parameter for realizing high‐efficiency reliable LEDs. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)