Abstract
A novel spatial double-pulse laser ablation scheme is investigated to enhance the processing quality and efficiency for nanosecond laser ablation of silicon substrate. During the double-pulse laser ablation, two splitted laser beams simultaneously irradiate on silicon surface at a tunable gap. The ablation quality and efficiency are evaluated by both scanning electron microscope and laser scanning confocal microscope. As tuning the gap distance, the ablation can be significantly enhanced if the spatial interaction between the two splitted laser pulses is optimized. The underlying physical mechanism for the interacting spatial double-pulse enhancement effect is attributed to the redistribution of the integrated energy field, corresponding to the temperature field. This new method has great potential applications in laser micromachining of functional devices at higher processing quality and faster speed.
Highlights
Short pulsed laser has been employed as an effective tool for micromaching
As thermal diffusion dominates the nanosecond laser ablation, the ablation efficiency is restricted by the ablation threshold of materials, which strongly depends on their physical properties, such as absorption coefficient, thermal diffusivity, melting and boiling behaviors[13,14]
While decreasing the gap distance of two splitted laser beams to 80 μm as shown in Fig. 2(b), the 3D reconstruction and 2D profile of the crater clearly indicate that the side-by-side circular craters in Fig. 2(a) are merged into a single gourd-shaped crater and the material between the two craters is completely removed, leaving a broad flat bottom in the width more than 100 μm with only a few protrusions, indicating the improved quality of laser ablation
Summary
Short pulsed laser has been employed as an effective tool for micromaching. Versatile methods are offered for cutting, drilling and modification of various engineering materials[1,2,3]. Two splitted laser pulses are irradiated on the surface of the material at the same time at a tunable spatial gap between the double laser spots. By the interaction of the splitted laser pulses, the laser energy distribution of substrate surface can be modified, resulting in the change of temperature field to enhance the laser ablation efficiency.
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