Abstract
Continuous extreme ultraviolet (EUV) emission intensity from a laser-produced plasma in the wavelength between 40 and 200 nm for a copper–tungsten alloy target was observed to be 1.3 times higher than that for a tungsten target. Using the alloy target, low-opacity regions of one material were filled with high-opacity regions of another material. This opacity effect resulted in the increase of a calculated Rosseland mean opacity compared with either of the constituents, which may explain the increase of the EUV emission intensity.
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