Enhancement of EDAX Spectra from TEM and SEM Analysis

Abstract

The attachment of EDAX systems to the TEM and SEM makes possible the microanalysis of features observed in the high magnification images. In general the interpretation of the resulting spectra is very straightforward, with qualitative identification of the major and minor elements present requiring only reference to a simple chart, and semiquantitative estimation of concentration possible by direct comparison of peak heights. True quantitative analysis requires more complex mathematics and/or standards but this is not generally the aim of most SEM and TEM users.There is one class of problems for which the direct interpretation of the recorded EDAX spectrum can be difficult, especially for the operator not highly trained in EDAX methods. This is the case of very low total count rates, typically encountered with low concentrations of elements in organic matrices and/or with low total specimen mass as encountered with thin sections.