Abstract
Improving the energy storage performance of dielectric capacitors has always been a spotlight. Large polarization and high breakdown strength are two key parameters for achieving excellent energy storage performance. Herein, in Ba(Zr0.3Ti0.7)O3 (BZT) thin films an ultrahigh breakdown strength of 7.94 MV/cm is achieved due to the low leakage current density by regulating the growth oxygen pressure at a low level of 5 Pa. A combination of remarkable recoverable energy storage density (Wrec) of 89.9 J/cm3 and high efficiency (η) of 71.6% is successfully realized. Furthermore, the energy storage and insulation properties display superb fatigue endurance up to 107 cycles, indicating that the BZT film-based dielectric capacitors are quite competitive in the field of electronic power.
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