Abstract
A magnetized sheet plasma ion source was developed for steady state high density plasma with strong density and high temperature gradients. This feature provides efficient formation of negative hydrogen ( H -) ions over a wide beam extraction area through the electron volume process. A hexapole confinement at the cathode, addition of argon and magnesium seeding led to the increase of H - yield. The device configuration is suitable for plasma based materials processing namely, synthesis of TiN , SiH , SnO 2, and the formation of advanced MAX phase materials Ti2AlC , Ti2CdC and NbAlC .
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