Abstract
The gated polysilicon field emitter arrays coated with diamondlike carbon (DLC) were fabricated by a transfer mold method using anisotropic etching of Si and the deposition of DLC using methane ion beam. This paper describes significant enhancement in electron emission and considerable reduction in turn-on voltage for the emitter arrays by the DLC coating. In addition, the paper discusses the emission mechanism from the energy band diagram of a field emitter coated with a sufficiently thin dielectric material having a low electron affinity, and shows that an effective work function of the DLC coated polysilicon field emitter is about 2.9 eV.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
