Enhancement and Development of Next Generation Data Mining Photolithographic Mechanism

Abstract

The analytical data of project management was established. In a stereolithography method, the APC system was already implemented in essential dimensions and overlays. Productivity and system efficiency have been enhanced. The new APC, however, is created on the inspection information where the method anomalies are blended with the fluctuation of the system and which have to evaluate very small quantities, and it has the impact cap. The inspection data for the CD, overlay and log information of the acquaintance tool in ainteractive data base have been compiled and processed. We have also investigated how the earlier in this thread problem can be paid and resolved. First of all, in the enormous tool log data we have extracted ties between inspection informationbesides several parameters, particularly factor loadings. We then discussed problems with big relationships and have, thus, gathered valuable knowledge which did not come out of the traditional system. In order to show the stabilising machine fluctuation effect, we developed, along with APC, a second-generationinformation mining system.