Abstract
Diamond-like carbon (DLC)/CrN multilayer composite films with different modulation ratios were prepared by high power pulsed magnetron sputtering (HPPMS). The strengthening mechanism of tribological properties and corrosion resistance of multilayer DLC films were detailedly discussed. The results showed that the single layer DLC film peeled off after 25 min of friction, while the DLC/CrN multilayer films exhibited good wear resistance. The furrow phenomenon of wear track weaken, the depth of wear track decreased, and the wear resistance of the film enhanced with the increase of modulation ratio. The wear resistance of DLC film is directly related to its hardness, plastic deformation resistance and residual internal stress, and the DLC/CrN multilayer film with modulation ratio of 2:1 had the best wear resistance. Electrochemical experiments show that improving the density of the film, inhibiting the formation of corrosion ion diffusion channel and forming passive film at the interface are important factors to enhance the corrosion performance, and the DLC/CrN multilayer film with modulation ratio of 1:1 film had the best corrosion properties.
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