Abstract
This paper proposes a systematic synthesis methodology for a combined feedforward/feedback architecture to control multiple-input, multiple-output nanopositioning systems. Coprime factorization of the open loop model is used to design the reference and feedforward filters of the proposed control scheme to achieve enhanced tracking, eliminate the limitation of the feedback on tracking performance, and increase the bandwidth of the closed-loop system. Two types of coprime factorization, namely inner-outer factorization and normalized coprime factorization are discussed. A case study based on hardware experiment is presented to analyze the proposed control architecture and demonstrate its superiority over feedback-only control. In addition to the no-load case, the performance of the system is also tested with loads on the nanopositioning stage.
Highlights
N ANOPOSITIONING stages are used in a wide range of nanosciences and nanotechnologies, for example, atomic force microscopes (AFMs), scanning tunneling microscopes, lithography tools, and molecular biology [1]
The feedforward filter is designed via inversion of the nominal open loop model to enhance the tracking performance while the feedback controller maintains the robustness of the system against disturbances and uncertainties
Another control architecture is proposed in [30] to eliminate the detrimental effects of feedback control on tracking performance
Summary
N ANOPOSITIONING stages are used in a wide range of nanosciences and nanotechnologies, for example, atomic force microscopes (AFMs), scanning tunneling microscopes, lithography tools, and molecular biology [1]. These stages are typically flexible structures driven by piezoelectric actuators with the position measured by capacitive sensors. Control of nanopositioning stages is technically challenging [1], [3]. Date of publication November 6, 2014; date of current version April 14, 2015. Manuscript received in final form September 22, 2014. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org
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