Abstract
Pb0.3Sr0.7TiO3(PST) and Bi1.5Zn0.5Nb0.5Ti1.5O7 (BZNT) thin films were deposited on Pt/Ti/SiO2/Si substrates by Sol-gel and radio frequency (rf) magnetron sputtering, respectively. The dielectric and tunable properties of thin films were investigated as a function of heat treatment processes. It’s found that the heat treatment process at the appropriate temperature and time can be used to obtain a good thin film. The film has the best comprehensive dielectric properties by annealing at 650°C for 45min, the figure of merit (FOM) is 20.1.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
