Enhanced Stability and Sensitivity of AlGaN/GaN-HEMTs pH Sensor by Reference Device

Abstract

To improve the stability and sensitivity of pH sensors based on AlGaN/GaN high electron mobility transistors (HEMTs), we proposed a modified sensing structure by integrating a reference HEMT device. This structural pH sensor exhibits a typical Nernstian behavior with a sensitivity of 54.38 mV/pH, which is higher than the value of 49.43mV/pH derived from the AlGaN/GaN HEMT-based sensor without integrating the reference HEMTs device. Furthermore, the stability of the new structural sensor is enhanced by approximately 19.2% in comparison with that of its traditional counterpart. The improved performances are analyzed using an electrical double-layer model together with an equivalent circuit model, and we find that the new sensor structure has a larger capacitor and exhibits a better rectification effect, hence decreasing the electrical noise and enhancing the stability of the testing signal. Meanwhile, the new sensor structure displays a smaller equivalent resistance and results in a larger available output current, hence exhibiting a higher sensitivity.