Abstract

Enhanced Sensitive Surface Acoustic Wave Device Designed for Nitric Oxide Gas Detection

Highlights

  • Modern chemical sensors are designed to be highly sensitive and to efficiently transform chemical responses into measurable electronic signals

  • In a previous study,(23) we developed a bidirectional λ/4electrode transducer Surface acoustic wave (SAW) sensor coated with a 0.2% Cu2+/PANI/WO3 sensitive layer that sensitively detected nitric oxide (NO) at ppb levels in dry air

  • The sensitivity of device D1 was evaluated to be approximately 4.2 Hz/ppb (~3.43 kHz/mg/m3), which is approximately three times higher than that of device D0 (~1.5 Hz/ppb) for NO concentrations in the range of 20–80 ppb. These results indicate that the developed EWC/single-phase unidirectional transducer (SPUDT) SAW sensor exhibited accurate parts-per-billion-level detection, optimal reversibility, and rapid response to NO at room temperature (RT)

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Summary

Introduction

Modern chemical sensors are designed to be highly sensitive and to efficiently transform chemical responses into measurable electronic signals. These devices should be designed such that they can be used for wireless communication and should be small to realize portable and miniaturized detection chips. In February 2010, the American Conference of Governmental Industrial Hygienists adopted a new threshold limit recommendation for H2S. The NO geometric mean ranges from 6 to 98 ppb.[8,9] it is crucial to fabricate sensing devices that can detect parts-per-billion levels of the gas with high sensitivity

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