Abstract
This study focuses on evanescent fields induced by silver nanoparticles in the mask layer and in the interfaces in an AgOx-type super-resolution near-field structure (super-RENS). The finite-difference time-domain (FDTD) method is used to analyze the scattering fields from the localized surface plasmons of silver nanoparticles. It has been found that the spatial extension of the evanescent field is very short along the thickness direction of the layers, and the 3-dimensional coupling patterns of the evanescent fields from the individual particles are irregular. The study also found that the intensity of the evanescent fields is dependent on the silver concentration.
Published Version
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