Abstract

MoO3 thin films are fabricated using nebulizer spray pyrolysis technique, which is doped with Fe at various concentrations of 1, 2, 3, and 4% for ammonia gas sensors application at room temperature. X-ray diffraction (XRD) study confirms the growth of the crystal by Fe doping up to 3%, nano rods shape morphology of the thin film samples observed by field emission scanning electron microscope (FESEM), reduction in bandgap is evidenced via UV-VIS spectrophotometer. Gas sensing study is performed using gas analyzing chamber attached with Keithley source meter. Since 3% Fe doped MoO3 sample displayed nano rods over the film surface which exhibits highest sensitivity of 38,500%, in a short period of raise and decay time 54 and 6 s. Our findings confirms that the 3% Fe doped MoO3 films suitability for ammonia gas sensing application.

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