Abstract
We report the formation of p-type nitrogen doped ZnO (ZnO:N) grown by thermal-evaporation deposition. We found that the ZnO nano/micro structured rods can improve nitrogen doping. In addition, co-doping with metal (excess Zn in this study) can enhance nitrogen doping through a Zn-rich process. The effects of nitrogen precursors on the electrical and optical properties of ZnO:N were investigated. This study shows that growth process plays a critical role in the electrical properties of ZnO:N.
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