Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase

Abstract

Inductive discharges with radio-frequency (RF) substrate bias are frequently used for various technological applications. We operate such a hybrid discharge with a phase-locked RF substrate bias at twice the frequency of the inductive coupling with fixed but adjustable phase between both RF sources in neon at low pressures of a few Pa. The ion flux to the substrate is found to be a function of this relative phase in the H-mode at constant RF powers as long as some residual capacitive coupling of the planar coil is present. For distinct choices of the phase, Phase Resolved Optical Emission Spectroscopy measurements show that energetic beam electrons generated by the expanding boundary sheaths (i) are well confined, (ii) are accelerated efficiently, and (iii) propagate vertically through the inductive skin layer at the times of maximum azimuthal induced electric field within the fundamental RF period. This enhances the inductive stochastic electron heating, the power coupling efficiency, and finally the ion flux.