Enhanced piezoelectric tactile sensing behaviors of high-density and low-damage CF4-plasma-treated IGZO thin-film transistors coated by P(VDF-TrFE) copolymers

Abstract

Piezoelectric pressure sensing behaviors of high-density and low-damage CF4-plasma-treated indium gallium zinc oxide (IGZO) thin-film transistors (TFTs) coated by poly(vinylidene fluoride-co-trifluoroethylene) (P(VDF-TrFE)) films have been investigated. The CF4 plasma treatment was performed on the IGZO channel by using an inductively coupled plasma (ICP) system with a quartz filter. Prior to the fabrication of devices, X-ray diffractometer (XRD) and atomic force microscopy (AFM) were applied to identify the enhancement in the crystallinity of P(VDF-TrFE) films on the plasma-fluorinated IGZO films. With the analyses of X-ray photoelectron spectroscopy (XPS), it is proved that the fluorine radicals reacted with the metal-oxygen bonds will increase the oxygen vacancies in IGZO films, contributing to an enhancement in field effect mobility (μFE) and drain current (IDS) of IGZO TFTs. Furthermore, the fluorine atoms diffused from the IGZO channel into the bottom SiO2 layer were confirmed by secondary ion-mass spectroscopy (SIMS), reducing the interfacial and oxide charges of the devices for a negative shift in threshold voltage (Vt). Under a 0.5-kg applied force press/release cyclic test, a 4.8-fold increase in drain current response of 1-min CF4-plasma-treated piezoelectric pressure sensors was optimized, because of the enhanced electrical behaviors of IGZO TFTs and an increase in aligned dipole moments of P(VDF-TrFE) copolymers. The promising results make the piezoelectric pressure sensors with high-density and low-damage CF4-plasma-treated IGZO TFTs coated by P(VDF-TrFE) copolymer suitable for future high-performance tactile sensing applications.