Abstract

Titanium dioxide thin films were deposited from the aerosol assisted chemical vapor deposition reaction of TiCl4 in toluene (1M) at 600°C and 5 L min−1. Electric fields were applied and increased in a range of 0 to 30 × 102 V m−1 during the reaction. Then, deposited films were annealed for 2 h at 600°C in atmospheric air in order to increase crystallinity. Changes in particle size, agglomeration and particle shape were observed for pre and post annealing samples. Raman spectroscopy analysis revealed different composition of anatase and rutile and crystal phase depending on the field strength applied. The photocatalytic activity was calculated from the half-life or time needed by the films to degrade 50% Resazurin dye-ink initial concentration. It was observed an optimum of titania photocatalytic activity (half-life values ∼3.5 min) for anatase to rutile ratios close to 1:1 confirming that similarly to titania powders, a photocatalytic synergy is possible for TiO2 thin films.

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