Abstract
Thin film thermocouples (TFTCs) as a kind of passive sensor are used to measure in-situ high temperature and integrated surface devices. In this work, La0.8Sr0.2CrO3/Pt TFTCs were successfully fabricated by RF sputtering method. When the TFTCs were tested below 900 °C for multi-cycles, they showed an excellent stability and reproducibility. By comparing with the thermal responses of uncoated and coated with Al2O3 protection layer, the coated TFTC had a higher measurement temperature than uncoated TFTC, and good durability. The failure of TFTCs was mainly attributed to the volatilization of Pt and 0.2LSCO thin films at high temperature, while 0.2LSCO had a better thermal stability than Pt. The La0.8Sr0.2CrO3/Pt TFTC coated with Al2O3 protection layer may provide a new candidate thermal sensor for high temperature sensing in air.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.