Abstract
Abstract— A new raster‐scanning chipset which provides enhanced projection performance is presented. The design is novel in that it combines electrostatic and electromagnetic actuation methods, along with a unique feedback‐control scheme to produce SVGA and WVGA projected images. A micromirror, the actuators, and drive electronics are integrated into a small, power‐efficient system, a scanning chipset, to increase its reliability and manufacturability.
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