Abstract
The complex internal structure of the aero-engine and the high-temperature, high-pressure, and high-speed airflow make it difficult to measure the internal temperature. Indium tin oxide (ITO) and In2O3 films have been studied for their application in high-temperature thermocouples and strain gauges. Due to their large Seebeck coefficient and high-temperature stability, ceramic thin-film thermocouples are expected to be used at high-temperature measure. In this paper, ITO-In2O3 thermocouples were fabricated by magnetron sputtering. Besides, the electrical properties of the air-annealed and two-step nitrogen-annealed thermocouples were compared, including the repeatability of thermoelectric response after multiple thermal cycles and the drift rate during the high-temperature duration. The microstructure and electrical conductivity of both the as-deposited and post-annealed ceramic thin films were tested respectively. The result shows that the resitivity and Seebeck coefficient of the thin films annealed in nitrogen is reduced, but the stability at high temperature is greatly improved.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
