Abstract

Nowadays, the use of plasmonic metal layers to improve the photonic emission characteristics of several semiconductor quantum dots is a booming tool. In this work, we report the use of silicon quantum dots (SiQDs) embedded in a silicon nitride thin film coupled with an ultra-thin gold film (AuNPs) to fabricate light emitting devices. We used the remote plasma enhanced chemical vapor deposition technique (RPECVD) in order to grow two types of silicon nitride thin films. One with an almost stoichiometric composition, acting as non-radiative spacer; the other one, with a silicon excess in its chemical composition, which causes the formation of silicon quantum dots imbibed in the silicon nitride thin film. The ultra-thin gold film was deposited by the direct current (DC)-sputtering technique, and an aluminum doped zinc oxide thin film (AZO) which was deposited by means of ultrasonic spray pyrolysis, plays the role of the ohmic metal-like electrode. We found that there is a maximum electroluminescence (EL) enhancement when the appropriate AuNPs-spacer-SiQDs configuration is used. This EL is achieved at a moderate turn-on voltage of 11 V, and the EL enhancement is around four times bigger than the photoluminescence (PL) enhancement of the same AuNPs-spacer-SiQDs configuration. From our experimental results, we surmise that EL enhancement may indeed be due to a plasmonic coupling. This kind of silicon-based LEDs has the potential for technology transfer.

Highlights

  • Since the first reports of luminescence and electroluminescence, originated by quantum size effects, from highly confined silicon materials [1,2,3], there has been a growing interest in the development of monolithic silicon photonics as the optical analogue of silicon microelectronics [4,5,6,7]

  • In order to meet this goal, arduous work has been done over the years to fabricate light emitters and electroluminescent devices based mainly on crystalline and amorphous silicon quantum dots (SiQDs) embedded in silicon nitride and silicon dioxide films, and to tune the photoluminescence by controlling the size and the surface passivation of the SiQDs [8,9,10,11,12,13]

  • Authors have reported enhanced luminescence from SiQDs implanted in quartz and coupled to Ag island arrays fabricated by electron beam lithography or by subsequent implantation

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Summary

Introduction

Since the first reports of luminescence and electroluminescence, originated by quantum size effects, from highly confined silicon materials (superlattices, quantum dots, and quantum wires) [1,2,3], there has been a growing interest in the development of monolithic silicon photonics as the optical analogue of silicon microelectronics [4,5,6,7]. One of the first pioneer works, reported local field-enhanced light emission from silicon nanocrystals implanted in quartz close to a surface film of nanoporous gold, prepared by wet chemical methods [14].

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