Abstract
We describe the inkjet printing of lanthanum nickelate (LaNiO3) top electrodes onto ferroelectric Pb(Zr,Ti)O3 films on platinized silicon substrates. The developed ink formulation enables the deposition of well-defined, smooth, and flat layers with minimal inter-diffusion at the LaNiO3–Pb(Zr,Ti)O3 interface. The capacitors exhibit better polarization switching characteristics, improved fatigue properties, and about 40% larger dielectric constant than those with sputtered Au top electrodes. The Rayleigh analysis of dielectric response reveals enhanced domain wall motion in capacitors with printed LaNiO3 electrodes, most probably due to (i) effective compensation of oxygen vacancies by the oxide electrode, (ii) thinner depletion regions at the electrode–ferroelectric interface, and (iii) lower concentration of charged defects introduced by processing.
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