Abstract
Amorphous SrTiO3 thin films were fabricated on Pt (100)/Ti/SiO2/Si substrates by sol–gel and spin-coating technology and their surface and cross-section morphology were characterized by using field emission scanning electron microscopy. A broad absorption band at about 3390 cm−1 owing to the stretching vibrations of hydroxyl groups in the absorbed water was observed from fourier transform infrared spectroscopy. J–E measurements were used to investigate the electrical characteristics of SrTiO3 films. The breakdown characteristics and leakage current are strongly dependent upon their electrode materials. SrTiO3 films with Al top electrodes exhibit significantly higher breakdown strength and much lower leakage current than those with Au top electrodes. Moreover, samples with Al electrodes exhibit distinct electrical characteristics when a negative voltage was applied under different testing conditions. The surface chemical state of aluminum was analyzed by using X-ray photoelectron spectroscopy, indicating that the 45 nm thick Al electrode was completely transformed into aluminum oxide layer when a positive voltage was applied. These results show that the anodic oxidation of the Al electrodes and films is suggested to be responsible for the enhanced electrical characteristics of SrTiO3 thin films.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
More From: Journal of Materials Science: Materials in Electronics
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.