Enhanced dynamic reconstruction for atom probe tomography

Abstract

Many studies have focussed on the optimization of atom probe tomography data reconstruction. In this article, an enhanced dynamic reconstruction algorithm based on the approach initially developed by Gault et al. in 2011 is proposed. The dynamic reconstruction takes into account the evolution of the reconstruction parameters during the field evaporation of the sample, contrary to the standard reconstruction protocol, for example proposed by Bas et al. in 1995. Here, the evolution of reconstruction parameters is retrieved by field evaporation simulation. This approach allows a complete tabulation of the parameters evolution as a function of the analyzed sample morphology and its initial microstructure. The only inputs for experimental data are the voltage curve and some simple morphological parameters of the sample. This will be demonstrated by applying this algorithm to some experimental cases. Drastic optimization of the spatial accuracy in reconstructed datasets is experimentally and theoretically demonstrated.