Abstract
The decomposition of CF4 using pulsed-electron-beam-generated atmospheric-pressure nonthermal nitrogen plasmas (CF4 900 ppm, 130 kPa) is demonstrated. A high energy efficiency was obtained in the destruction and removal of CF4 compared with the results obtained using dielectric-barrier-discharge plasmas. The results are mainly attributed to the enhanced decomposition of CF4 by nitrogen ions that are efficiently generated by high-energy electron beams. The scavenging of reactive intermediates from the plasma without producing hydrogen fluoride is also attempted and its validity is discussed.
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