Abstract
Barium-strontium niobate in thin film form can be considered as a prospective ferroelectric material for microwave applications due to high dielectric nonlinearity. Its performance is linked to film structure quality, and one method to achieve high-quality films on microwave substrates goes through the process of annealing. (Sr,Ba)Nb2O6 films of good crystallinity were formed on sapphire and alumina substrates by magnetron sputtering. The processes of recrystallization of films on single- and polycrystalline substrates under the conditions of ex situ annealing at temperatures of 1100–1200 °C were studied. Highly (00l) oriented films on sapphire substrate were obtained by the deposition in oxygen atmosphere at a substrate temperature of 900 °C with post-growth annealing in air at an annealing temperature of 1150 °C.
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