Abstract
Blue InGaN/GaN light emitting diodes (LEDs) have been grown by using low-pressure metalorganic chemical vapor deposition. To improve the light extraction from the LEDs, we have fabricated nanohole arrays on top of the p-GaN layer by using anodic aluminum oxides as etch masks. The AAO membranes are fabricated by using a two-step anodization process in an oxalic-acid solution. Atomic force microscopy and field emission scanning electron microscopy show that the nanohole arrays formed on top of the LEDs have a quasi-hexagonal geometry. The cathodoluminescence measurements are used to investigate the light extraction from the nanopatterned samples. Cathodoluminescence intensity of a LED with the nanohole array is enhanced up to 10 times compared to that of a sample without a nanohole array. We also investigated the spatially-resolved luminescence profile around the nanoholes.
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