Abstract
A practical method to mass-produce gratings with limited lateral dimension is to emboss master grating into a Sol-gel waveguide film. Sol-gel titanium dioxide (TiO2) thin film has been deposited on glass substrate using titanium precursors at low temperature environment. As-deposited films were amorphous. The morphology of the deposited film was analyzed by using high resolution SEM (HRSEM).The contact angle of water droplet on the film surface (hydrophilic properties) was measured by contact angle analysis. From the results; the formation of nano diffractive structure TiO 2 film obtained at low load and temperature environment was suggested for high quality structure.
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