English

Abstract

In this study, various materials like ZnO, PZT, BaTiO3, and LiNbO3 for piezoelectric thin-film are used to simulate Solidly Mounted Resonators (SMR). These materials have unique material characteristics that make them suitable for a specific application. High Q Factors are needed in communication systems for low noise and extremely sensitive signals. For the purpose of raising the SMR resonator's Q Factor, the various piezoelectric materials are examined. It is investigated how an SMR performs in connection to the stages of the Bragg reflector configuration and its constituent parts. Layers having low and high acoustic impedances, including SiO2/AlN, SiO2/W, SiO2/Mo, SiO2/ZnO and SiO2/Ta2O5, make up Bragg's reflector design. A comprehensive investigation of flexible SMR was conducted using COMSOL Multiphysics element method (FEM) simulations. The implications of the building phases and material used to make Bragg's reflectors on the functionality of the flexible SMR are thoroughly analyzed. Multiple Bragg's reflector designs' comparative results have been gathered and reported. W/SiO2-based Bragg's reflector topologies have been discovered in the most recent research with ZnO and are most suited to offer increased coupling coefficient and Quality Factor performance. It was found that 0.2 um, 0.3 um, and 0.1 um, respectively, were the best-optimized thicknesses for top metal electrodes, the piezoelectric layer, and the low and high acoustic impedance brag reflector layers. The current study's findings demonstrate that the simulated values of the coupling coefficient (Keff2 ) and quality factor (Q) for the optimal dimension of the SMR structure are 0.09117 (or 9.117%) and 2335, respectively.