Abstract
In a dielectric barrier discharge, countless pulsed microdischarges with a diameter of about $100~\mu \text{m}$ appear and disappear. Since such microdischarges will affect ozone generation, it is important to understand their characteristics. In the case of a short discharge gap, which has been adopted recently, the transferred charge of a microdischarge is treated as a sphere on the dielectric to simplify the modeling. In this article, we discuss how various parameters affect ozone generation by comparing simulation and experimental results. We also discuss the influence of the thickness and dielectric constant of the dielectric barrier on the characteristics of ozone generation.
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