Abstract
We present in this paper an experimental device for determining for an electron beam incident normal to a target, the angular and energetic backscattered electron distribution as a function of the emission angle. The originality of our setup lies in the fact that under a normal incidence the particules reach the target which remains stationary. The detection system, placed on a rotating arm around the point of impact of the incident beam consists of a semiconductor detector (PIN diode). To enable its use as a detector of electron whose energy is comprised between 10 and 40 keV, a specially tailored electronic device was required. In order to enhance the energy resolution the PIN diode is cooled down at liquid nitrogen temperature.Figure 1 gives an example of the type of spectrum obtained. At a low energy, the electronic noise due the measurement setup appears in the form of the peak at 2 keV, irrespective of the nature of the target, the detection angle θ or the incident energy Eo chosen.
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Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
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