Abstract
Model trajectory calculations of the energy transfer processes in collisions of Ar with highly vibrationally excited CH 4 , CD 4 , SiH 4 and CF 4 are performed. Special attention is payed to the calculation of the energy transferred to active (vibrational) degrees of freedom. The results support the diffusion model of excitation-dissociation and give the low pressure collision efficiency β c which qualitatively agrees with experiment in magnitude and temperature dependence.
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