Abstract
Development of a high voltage nano-seconds pulsed power generator (NS-PG) is attracting attentions from plant manufacturing makers since it enables higher energy efficiencies of plasma processing: such as pollution control, ozone generation and so on. The pulsed power system developed in this study consisted of a pulsed charging circuit, the NS-PG, and a load. The NS-PG consisted of a high-pressure spark gap switch (SGS) as a low inductance self-closing switch, a triaxial Blumlein line as a pulse-forming line, and a voltage transmission line from the Blumlein line to load. The SGS was filled with SF6 gas, and the output voltage of the generator is regulated by varying the pressure of SF6. The pulse duration of output voltage is 5 ns. In this study, energy transfer efficiency from NS-PG to load is investigated for both positive and negative voltage polarities. In addition, experiments were carried out using a low inductance resistor and a discharge reactor as connected load. The results showed maximum energy transfer efficiency was 85.2% in case of a low inductance resistive load, and 56.7% in case of a discharge reactor. Further efficiency can be achieved by impedance matching the discharge reactor to the NS-PG.
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