Energy transfer and patterning characteristics in pulsed-laser subtractive manufacturing of single layer of MoS2

Abstract

The single-layer Molybdenum disulfide (MoS2) was subtracted by using pulsed lasers with different parameters. The machining results were tested by optical microscopy, Raman spectrum, photoluminescent (PL) spectrum, scanning electron microscopy (SEM), and atomic force microscopy (AFM), indicating that the femtosecond laser machining has a better boundary effect than the nanosecond laser. Molecular dynamics (MD) were used to simulate the subtractive manufacturing effect and thermal transfer under different pulse widths and energy conditions. It has been proved that the short-width pulsed laser is more suitable for patterning MoS2. During the MD simulation, wrinkles and defects were found during the laser machining of long-width pulsed laser. The band structure of MoS2 was calculated by density functional theory (DFT) to investigate the effect of different wrinkle and defect conditions on the nonlinear laser absorption. The effect of defects on MoS2 thermal transfer was explored by plasma construction defects. The energy transfer during long-width pulsed laser machining was obtained. This work provides fundamental understanding of laser patterning and machining of MoS2 for future device applications.