Energy spectra of heavy particles bombarding the cathode surface in a dc glow discharge and its effects on low energy implantation

Abstract

Radio frequency glow discharges are employed in surface processing where low energy and low damage conditions are required. Direct current glow discharges are to be preferred, however, for more rapid sputtering and deposition. In order to be able to design glow discharge cells, it is essential to understand energy spectra of ions and neutrals created and accelerated in the discharge and their effects on the parameters associated with particles incident on the bombarded cathode. This paper reviews the important models which may be employed in the determination of energy/angle spectra, describes how energy spectra from these models may be employed in the prediction of implantation characteristics in cathode targets and compares experimental and theoretical results for a polycrystalline copper surface in a dc oxygen glow discharge.