Abstract
The mechanical properties of materials such as elastic modulus, hardness, and fracture toughness, can be measured by nanoindentation. For a thin film coated on an elastic substrate, the cross-sectional nanoindentation technique can decrease the influence of plastic deformation around the nanoindenter apex on fracture toughness for interface delamination. Considering the effect of the elastic substrate, the theory of an elastic beam bonded to an elastic foundation is further developed to obtain the energy release rate of interfacial debonding. Explicit closed-form solutions are determined, and the influence of the substrate on the energy release rate is shown graphically.
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