Abstract
Direct current (dc) plasma torch with inter-electrode inserts has the merits of fixed arc length, relative high enthalpy and may show advantages in future plasma processes where stability and controllability are must-have. Energy fluctuations in the plasma may result from power supply ripple, arc length variation, and/or acoustic oscillation. Using an improved power supply with a flat waveform, the characteristics of an argon plasma energy instabilities under reduced pressure were studied by means of simultaneously monitoring the arc voltage and arc current spectrum. Dependence of the arc fluctuation behavior on the plasma generating parameters, such as the current intensity, the plasma gas flow rates and the vacuum chamber pressure were investigated and discussed. Results show that the plasma torch has a typical U-shaped voltage-ampere characteristic (VAC). The correlation between the VAC and the probability of energy distributions was studied. Through pressure measurements at the cathode cavity and the vacuum chamber, the existence of sonic flow in the inter-electrode insert channel was confirmed.
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