Abstract
Energy-filtered X-ray photoemission electron microscopy (EXPEEM) is a new surface chemical imaging method that combines X-ray photoelectron spectroscopy (XPS) and photoemission electron microscopy (PEEM). We have developed a collinear type EXPEEM system using a Wien-filter-type electron energy analyzer. The collinear arrangement has the advantage of carrying out an easy alignment of the electron optical axis. We have measured EXPEEM images, μ-X-ray absorption near edge structure (μ-XANES) and μ-XPS of Au on Ta and Ag(DM) 2. We discuss the advantage of EXPEEM and future applications to organic devices.
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