Energy Filtered Imaging and Convergent Beam Electron Diffraction (CBED) in the Transmission Electron Microscope (TEM)

Abstract

Over the last ten years TEMs have been developed that are capable of HREM, EDX, PEELS and diffraction using a single objective pole piece. More recently these TEMs have been equipped with the capability of energy filtering the electron beam after it has passed through the sample so that energy filtered images and electron diffraction patterns can be obtained. In this work the use of a Topcon 002B TEM equipped with a GATAN PEELS imaging filter (GIF) to generate zero-loss energy filtered zone axis CBED patterns and elemental images from inelastically scattered electrons will be described. An analysis of this energy filtered data indicates that elemental imaging using the GIF is an informative, but semiquantitative technique, whereas zero-loss energy filtered zone axis CBED patterns can be accurately quantified so that the two lowest-angle x-ray form factors of cubic elements can be measured with errors of the order of 0.1% or less.