Abstract

Relative energy spectra of sputtered alkali ions from three alkali-halide crystals (LiF, NaCl, and KCl) were measured by bombarding the energetic rare gas ions (He+ and Ar+) whose energies ranged from 10 keV up to 100 keV. It was found that the energy spectrum of K+ ions from a KCl crystal were in close agreement with the energy spectrum of sputtered ions from the metal surface in both respects of the shape and the peak position, whereas Na+ ions from an NaCl crystal were likely to fit to the energy spectrum of neutral atoms rather than that of ionic one, and Li+ ions sputtered from an LiF showed also neutral spectrum with slightly different asymptotic behaviors in the higher energy region.

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