Abstract
Investigation results are presented for the ion energy distribution in the cathode region of direct current discharges in argon-oxygen mixtures containing 0–100% argon at different plasma parameters (a pressure of 1.0–3.0 Pa and a discharge current of 10.0–30.0 mA). It has been shown that an argon percentage of more than 20% results in the Ar 2+ ion formation and shifting the distribution maximum to higher energies.
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