Energy Dispersive X-Ray Spectrometry in Ultra-high Vacuum Environments

Abstract

The addition of an energy dispersive x-ray spectrometer to the ultra-high vacuum (UHV) environment present in many modern electron microscopes should be done under two major constraints. First, the addition of the spectrometer should not compromise the UHV environment in the specimen chamber, and second, the vacuum environment of the electron microscope should not compromise the performance of the spectrometer. Thus, the successful addition of an EDS to a UHV vacuum system requires an understanding of UHV and of how the constituents of the vacuum can affect the performance and the sensitivity of the EDS. Materials used in the construction of the spectrometer as well as the mechanical design of the spectrometer must be compatible with UHV conditions.