Abstract
A scanning micro-imaging instrument using an energy dispersive transmission X-ray spectrometry is developed. This instrument consists of micro X-ray source, X-ray guide tube, x–y scanning stage, and an SDD (Silicon Drift Detector), which is an energy dispersive X-ray spectrometer with a high throughput signal processor for measuring transmission X-ray spectrum. Using this instrument, (1) two-dimensional imaging of an intermediate product of multi-layer ceramic capacitor, and (2) thickness distribution imaging of an aluminum can-tab top, are performed nondestructively.
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