Abstract

The work provides the analysis of power characteristics of the industrial equipment – ionic nitriding applications – with different types of vacuum chambers – with hot and cold walls. The calculations results and experimental researches of thermal balance of the system “melt-wall chamber” at the process of plasma nitration for industrial applications are given. The work examines the influence of heat-shielding screens quantity in the applications with cold walls on the internal screen temperature and power of thermal losses at warming up parts melt and at its isothermal endurance. It has been displayed the significant influence of the discharge chamber geometry on the discharge power value which is necessary for the melt warming up and its exposition at the certain temperature – the less are geometrical sizes of the chamber (diameter and height), the smaller is the power of the smoldering discharge which is required for ensuring necessary melt temperature. It is shown that at sufficient melt parts distance from the chamber walls, the voltage drop on the skeleton of the smoldering discharge can be tens volts that causes the decrease of cathodic falling potential and, respectively, the increase of the electric power which is required to maintain necessary melt temperature in comparison to melt which is as close as possible to chamber walls. It leads to the fact that at more dense loading, smaller specific consumption of the electric power to ensure the necessary depth of the nitrated layer is required; at the same time the specific energy consumptions by the melt temperature of 525–530 °C are 0.6–1.6 kW∙h/kg, depending on the loading extent of the chamber. It has been displayed that at ionic nitration, the value of working gas pressure must provide the deviance of the smoldering discharge i. e. the whole area the cathode –melt must be captured by the discharge luminescence.

Highlights

  • The work provides the analysis of power characteristics of the industrial equipment – ionic nitriding applications – with different types of vacuum chambers – with hot and cold walls

  • The work examines the influence of heat-shielding screens quantity in the applications with cold walls on the internal screen temperature and power of thermal losses at warming up parts melt and at its isothermal endurance

  • It has been displayed the significant influence of the discharge chamber geometry on the discharge power value which is necessary for the melt warming up and its exposition at the certain temperature – the less are geometrical sizes of the chamber, the smaller is the power of the smoldering discharge which is required for ensuring necessary melt temperature

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Summary

Introduction

В установках с горячими стенками для поддержания температуры садки на необходимом уровне допускается снижение мощности тлеющего разряда по сравнению с такой же камерой с холодными стенками. Целью данной работы является анализ энергетических и газодинамических (давление, расход газа, состав газовой смеси) характеристик установок промышленного типа с холодными и горячими стенками на основе анализа процесса теплообмена в вакуумной камере в системе «садка деталей – стенки рабочей камеры»

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