Energy and angular distributions of sputtered particles: A comparison between analytical theory and computer simulation results

Abstract

Sputtering from a collision cascade, initiated by ion bombardment of a random medium, is investigated via a numerical solution scheme of the linear Boltzmann equation (BEST). Energy and angular distributions are calculated for several commonly used interaction cross sections. The results are in good agreement with available analytical solutions. In particular, recently obtained analytical results for the half space energy and angular distributions are confirmed and extended to more general cross sections. A comparison with results obtained by the simulation code TRIM is undertaken. TRIM's energy distributions can be reproduced. It is however essential not only to use the same interaction potential but also to introduce the same cut off in the cross section as TRIM employs. TRIM'S angular distributions deviate from the BEST results. The origin of these deviations is discussed.