Energy and angular distributions of ions and neutrals extracted from a slot in contact with a high-density plasma

Abstract

The energy and angular distributions of ions and neutrals extracted from a two-dimensional slot in contact with a high-density Ar plasma were investigated. A combined fluid/Monte Carlo simulation was developed to follow the trajectories of ions and fast neutrals through the sheath and out the slot. The energy and angular distributions reflect the strong disturbance of the sheath when the slot size is comparable to the sheath thickness.